GATE DOOR

GATE DOOR - Slit Valve Door

Slit Valve Doors (SVDs) play a key role in semiconductor wafer manufacture. SKN provides a wide range of Slit Valve Door designs coupled with an extensive range of high purity elastomer a seals developed specifically for aggressive semiconductor sealing applications.

Bonded Slit Valve Doors

Features of Bonded Slit Valve Doors:

  • Available in a wide range of sizes, profiles and designs.

  • Fitted with industry-leading range of Semiconductor grade elastomers including Perlast® and Kimura®, offering the highest levels of chemical resistance and reduced particulation in plasma environments.

  • A board range of seal profiles designed to reduce localized stresses, resulting in improved seal performance and life time.

Monovat® Gate Valves

Features of Monovat Gate Valves:

  • Available in various sizes and profiles for different semiconductor manufacturing platforms.

  • A broad range of seal profiles designed to reduce localized stresses, resulting in improved seal performance and life time.

  • Highest level of plasma and chemical resistance.